Kozin, A. A.Shapovalov, V.I.Ahmedov, HajiDemir, ArifKorutlu, BesteShabalin, A. E.2024-06-132024-06-1320201742-658810.1088/1742-6596/1713/1/0120212-s2.0-85098787170https://doi.org/10.1088/1742-6596/1713/1/012021https://hdl.handle.net/11501/95617th International Scientific and Technical Conference Rapid Solidification Materials and Coatings, RSMC 2020 -- Moscow -- 20-21 October 2020In this work, thermal processes in direct current operating magnetron with hot titanium target are studied in Argon medium. Thermal processes are described by stationary, three-dimensional, heat equation with surface heat source which is the flux of argon ions from the gas discharge. The problem was solved numerically via the Heat Transfer Module in COMSOL Multiphysics Software.eninfo:eu-repo/semantics/openAccessArgonCoatingsHeat TransferMagnetronsArgon PressureConference Object1Q31713