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  • Küçük Resim
    Öğe
    Plasma studies in TÜBİTAK national metrology institute
    (Gebze Teknik University, 2021) Ahmedov, Hacı; Korutlu, Beste; Orhan, Recep; Okumuş, Esra; Demir, Arif
    Over the past few decades, low-temperature plasma researches have gained momentum as they lie at the core of numerous applications in industry, environment and medicine. Recently, metrology community has also begun to take advantage of the unusual properties of plasma to develop new advanced measurement techniques and new measuring devices. In accordance with this purpose, in 2019, the Plasma Laboratory was installed in TÜBİTAK National Metrology Institute (UME) within the scope of infrastructure research and development program founded by Industry Ministry of Turkey for contributing to the ongoing worldwide research on plasma studies. In this work, the current advances in Plasma Laboratory of UME will be introduced. We present the installed experimental set-up for low-temperature and low-pressure gas discharge plasma. We present our preliminary measurement results in determining electron temperature by Langmuir probe and optical emission spectrometer.
  • Küçük Resim
    Öğe
    Simulation of the effect of argon pressure on thermal processes in the sputtering unit of a magnetron with a hot target
    (Pergamon-Elsevier Science Ltd, 2021) Shapovalov, Viktor, I; Ahmedov, Haci; Kozin, Aleksandr A.; Demir, Arif; Korutlu, Beste
    In this work, thermal processes occurring in the sputtering unit of a DC magnetron with a hot titanium target are studied. The processes are described within the framework of a stationary heat problem with a surface source using a three-dimensional homogeneous Fourier equation. The problem was solved numerically using the Heat Transfer Module of the COMSOL Multiphysics software. The novelty of the work is the creation of a 3D model of a vacuum chamber with a sputtering unit attached to it. In this case, in the boundary conditions, the heat removal from the target of the sputtering unit is specified, not only in the form of radiation and by the elements of the target attachment, but also due to the thermal conductivity of the gas. The effective temperature of the target surface is revealed to be dependent on the discharge current and pressure exponentially. The simulation results conform with the experimental data.