Study of the effect of argon pressure on the temperature of a hot target

Küçük Resim Yok

Tarih

2020

Dergi Başlığı

Dergi ISSN

Cilt Başlığı

Yayıncı

IOP Publishing Ltd

Erişim Hakkı

info:eu-repo/semantics/openAccess

Özet

In this work, thermal processes in direct current operating magnetron with hot titanium target are studied in Argon medium. Thermal processes are described by stationary, three-dimensional, heat equation with surface heat source which is the flux of argon ions from the gas discharge. The problem was solved numerically via the Heat Transfer Module in COMSOL Multiphysics Software. © 2020 Institute of Physics Publishing. All rights reserved.

Açıklama

17th International Scientific and Technical Conference Rapid Solidification Materials and Coatings, RSMC 2020 -- 20 October 2020 through 21 October 2020 -- -- 165885

Anahtar Kelimeler

Argon, Coatings, Heat transfer, Magnetrons, Argon pressure, Comsol multiphysics, Direct current, Gas discharge, Heat equation, Heat sources, Thermal process, Titanium targets, Rapid solidification

Kaynak

Journal of Physics: Conference Series

WoS Q Değeri

Scopus Q Değeri

N/A

Cilt

1713

Sayı

1

Künye