Study of the effect of argon pressure on the temperature of a hot target
Küçük Resim Yok
Tarih
2020
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
IOP Publishing Ltd
Erişim Hakkı
info:eu-repo/semantics/openAccess
Özet
In this work, thermal processes in direct current operating magnetron with hot titanium target are studied in Argon medium. Thermal processes are described by stationary, three-dimensional, heat equation with surface heat source which is the flux of argon ions from the gas discharge. The problem was solved numerically via the Heat Transfer Module in COMSOL Multiphysics Software. © 2020 Institute of Physics Publishing. All rights reserved.
Açıklama
17th International Scientific and Technical Conference Rapid Solidification Materials and Coatings, RSMC 2020 -- 20 October 2020 through 21 October 2020 -- -- 165885
Anahtar Kelimeler
Argon, Coatings, Heat transfer, Magnetrons, Argon pressure, Comsol multiphysics, Direct current, Gas discharge, Heat equation, Heat sources, Thermal process, Titanium targets, Rapid solidification
Kaynak
Journal of Physics: Conference Series
WoS Q Değeri
Scopus Q Değeri
N/A
Cilt
1713
Sayı
1