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Study of the effect of argon pressure on the temperature of a hot target
(IOP Publishing Ltd, 2020) Kozin, A. A.; Shapovalov, V.I.; Ahmedov, Haji; Demir, Arif; Korutlu, Beste; Shabalin, A. E.
In this work, thermal processes in direct current operating magnetron with hot titanium target are studied in Argon medium. Thermal processes are described by stationary, three-dimensional, heat equation with surface heat source which is the flux of argon ions from the gas discharge. The problem was solved numerically via the Heat Transfer Module in COMSOL Multiphysics Software.