Simulation of the effect of argon pressure on thermal processes in the sputtering unit of a magnetron with a hot target

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dc.contributor.authorShapovalov, Viktor, I
dc.contributor.authorAhmedov, Haci
dc.contributor.authorKozin, Aleksandr A.
dc.contributor.authorDemir, Arif
dc.contributor.authorKorutlu, Beste
dc.date.accessioned2024-06-13T20:18:06Z
dc.date.available2024-06-13T20:18:06Z
dc.date.issued2021
dc.departmentFakülteler, Mühendislik Fakültesi, Metalurji ve Malzeme Mühendisliği Bölümü
dc.description.abstractIn this work, thermal processes occurring in the sputtering unit of a DC magnetron with a hot titanium target are studied. The processes are described within the framework of a stationary heat problem with a surface source using a three-dimensional homogeneous Fourier equation. The problem was solved numerically using the Heat Transfer Module of the COMSOL Multiphysics software. The novelty of the work is the creation of a 3D model of a vacuum chamber with a sputtering unit attached to it. In this case, in the boundary conditions, the heat removal from the target of the sputtering unit is specified, not only in the form of radiation and by the elements of the target attachment, but also due to the thermal conductivity of the gas. The effective temperature of the target surface is revealed to be dependent on the discharge current and pressure exponentially. The simulation results conform with the experimental data.
dc.description.sponsorshipSt. Petersburg Elec-trotechnical University ; Türkiye Bilimsel ve Teknolojik Araştırma Kurumu (TUBITAK)
dc.identifier.doi10.1016/j.vacuum.2021.110421
dc.identifier.issn0042-207X
dc.identifier.issn1879-2715
dc.identifier.scopus2-s2.0-85109427494
dc.identifier.scopusqualityQ1
dc.identifier.urihttps://doi.org/10.1016/j.vacuum.2021.110421
dc.identifier.urihttps://hdl.handle.net/11501/1226
dc.identifier.volume192
dc.identifier.wosWOS:000696612100001
dc.identifier.wosqualityQ2
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.institutionauthorDemir, Arif
dc.institutionauthorid0000-0002-3781-4505
dc.language.isoen
dc.publisherPergamon-Elsevier Science Ltd
dc.relation.ispartofVacuum
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.subjectMagnetron
dc.subjectHot Target
dc.subjectHeat Transfer Model
dc.subjectComsol
dc.titleSimulation of the effect of argon pressure on thermal processes in the sputtering unit of a magnetron with a hot target
dc.typeArticle

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