Fabrication and experimental study of micro-gripper with electrothermal actuation by stereolithography method

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dc.contributor.authorÜlkir, Osman
dc.contributor.authorErtuğrul, İshak
dc.contributor.authorAkkuş, Nihat
dc.contributor.authorÖzer, Salih
dc.date.accessioned2024-06-13T20:17:50Z
dc.date.available2024-06-13T20:17:50Z
dc.date.issued2022
dc.departmentFakülteler, Mühendislik Fakültesi, Mekatronik Mühendisliği Bölümü
dc.description.abstractThe aim of the study is to get high displacement values with low actuation voltage from the micro-gripper fabricated by stereolithography (SLA) method. Micro-grippers are devices based on a micro-electro-mechanical system (MEMS) preferred for manipulation and assembly in micro-fabrication. This article presents the modeling, fabrication, and experimental studies of a U-type electrothermal MEMS micro-gripper. The fabrication of the gripper was made by SLA, which is one of the additive manufacturing methods. The arm tip displacement of the gripper has been characterized in real-time by optical microscopy. In electrical characterization studies, the electrical voltage was applied to the pads of the micro-gripper. This voltage value was increased starting from 0V with 1V increments until deterioration was observed in the gripper. The micro-gripper is shown to actuate to a maximum opening displacement of 28.35 mu m at an applied voltage of 5V. The models are employed to examine key factors of the micro-gripper's performance including temperature distribution, displacement, and stresses based on an elastic analysis of structures. Experimental results for the displacement of the micro-gripper's arm tips were found to be in good agreement with the simulation results.
dc.identifier.doi10.1007/s11665-022-06875-5
dc.identifier.endpage8159
dc.identifier.issn1059-9495
dc.identifier.issn1544-1024
dc.identifier.issue10
dc.identifier.scopus2-s2.0-85128298059
dc.identifier.scopusqualityQ2
dc.identifier.startpage8148
dc.identifier.urihttps://doi.org/10.1007/s11665-022-06875-5
dc.identifier.urihttps://hdl.handle.net/11501/1112
dc.identifier.volume31
dc.identifier.wosWOS:000783394200004
dc.identifier.wosqualityQ3
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.institutionauthorAkkuş, Nihat
dc.institutionauthorid0000-0002-3891-5340
dc.language.isoen
dc.publisherSpringer
dc.relation.ispartofJournal of Materials Engineering and Performance
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.subjectAdditive Manufacturing
dc.subjectElectrothermal Actuation
dc.subjectElectrical Characterization
dc.subjectMEMS
dc.subjectStereolithography
dc.subjectTip Displacement
dc.titleFabrication and experimental study of micro-gripper with electrothermal actuation by stereolithography method
dc.typeArticle

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