Fabrication and Experimental Study of Micro-gripper with Electrothermal Actuation by Stereolithography Method
Küçük Resim Yok
Tarih
2022
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
Springer
Erişim Hakkı
info:eu-repo/semantics/closedAccess
Özet
The aim of the study is to get high displacement values with low actuation voltage from the micro-gripper fabricated by stereolithography (SLA) method. Micro-grippers are devices based on a micro-electro-mechanical system (MEMS) preferred for manipulation and assembly in micro-fabrication. This article presents the modeling, fabrication, and experimental studies of a U-type electrothermal MEMS micro-gripper. The fabrication of the gripper was made by SLA, which is one of the additive manufacturing methods. The arm tip displacement of the gripper has been characterized in real-time by optical microscopy. In electrical characterization studies, the electrical voltage was applied to the pads of the micro-gripper. This voltage value was increased starting from 0V with 1V increments until deterioration was observed in the gripper. The micro-gripper is shown to actuate to a maximum opening displacement of 28.35 mu m at an applied voltage of 5V. The models are employed to examine key factors of the micro-gripper's performance including temperature distribution, displacement, and stresses based on an elastic analysis of structures. Experimental results for the displacement of the micro-gripper's arm tips were found to be in good agreement with the simulation results.
Açıklama
Anahtar Kelimeler
Additive Manufacturing, Electrothermal Actuation, Electrical Characterization, Mems, Stereolithography, Tip Displacement, Piezoelectric Actuator, Design, Manipulation, Microgripper
Kaynak
Journal of Materials Engineering and Performance
WoS Q Değeri
Q3
Scopus Q Değeri
Q2
Cilt
31
Sayı
10
