Optical and surface properties of ZnN thin films manufactured by radio frequency reactive magnetron sputtering

dc.authoridAydoğmuş, Tuna/0000-0002-8736-2949
dc.authoridÖZEN, Soner/0000-0002-2351-3234
dc.authoridSenay, Volkan/0000-0002-6579-2737
dc.authorwosidAydoğmuş, Tuna/AGN-4335-2022
dc.authorwosidAydoğmuş, Tuna/ABD-4947-2021
dc.authorwosidÖZEN, Soner/A-6737-2018
dc.contributor.authorSenay, Volkan
dc.contributor.authorOzen, Soner
dc.contributor.authorAydogmus, Tuna
dc.date.accessioned2024-06-13T20:18:01Z
dc.date.available2024-06-13T20:18:01Z
dc.date.issued2019
dc.departmentİstanbul Gedik Üniversitesien_US
dc.description.abstractZnN is a relatively new material and its physical properties are not yet well studied. In this research, ZnN thin films having different thickness values were deposited on glass substrates by means of radio frequency (RF) reactive magnetron sputtering technique at room temperature and some physical properties of ZnN thin films were investigated by several techniques. UV-vis spectrophotometer and reflectometer were employed to investigate the optical properties of the produced thin films. The surface properties were investigated by using tensiometer and atomic force microscope (AFM). The effects of film thickness on the optical and surface properties of ZnN thin films were discussed. The refractive index and band gap values were found to be dependent on thickness of ZnN thin films. The AFM investigations indicated that the surfaces of the films are compact and smooth. From the wetting experiments, it was found that the surfaces of the films are hydrophobic and surface free energy values are low as reported in literature.en_US
dc.identifier.doi10.1016/j.ijleo.2019.06.015
dc.identifier.endpage21en_US
dc.identifier.issn0030-4026
dc.identifier.scopus2-s2.0-85066798157en_US
dc.identifier.scopusqualityQ2en_US
dc.identifier.startpage15en_US
dc.identifier.urihttps://doi.org/10.1016/j.ijleo.2019.06.015
dc.identifier.urihttps://hdl.handle.net/11501/1164
dc.identifier.volume191en_US
dc.identifier.wosWOS:000494468300003en_US
dc.identifier.wosqualityQ2en_US
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherElsevier Gmbhen_US
dc.relation.ispartofOptiken_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectZnn Thin Filmsen_US
dc.subjectRf Magnetron Sputteringen_US
dc.subjectOptical Propertiesen_US
dc.subjectSurface Propertiesen_US
dc.titleOptical and surface properties of ZnN thin films manufactured by radio frequency reactive magnetron sputteringen_US
dc.typeArticleen_US

Dosyalar