Optical and surface properties of ZnN thin films manufactured by radio frequency reactive magnetron sputtering

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dc.authoridAydoğmuş, Tuna/0000-0002-8736-2949
dc.authoridÖZEN, Soner/0000-0002-2351-3234
dc.authoridSenay, Volkan/0000-0002-6579-2737
dc.authorwosidAydoğmuş, Tuna/AGN-4335-2022
dc.authorwosidAydoğmuş, Tuna/ABD-4947-2021
dc.authorwosidÖZEN, Soner/A-6737-2018
dc.contributor.authorSenay, Volkan
dc.contributor.authorOzen, Soner
dc.contributor.authorAydogmus, Tuna
dc.date.accessioned2024-06-13T20:18:01Z
dc.date.available2024-06-13T20:18:01Z
dc.date.issued2019
dc.departmentİstanbul Gedik Üniversitesi
dc.description.abstractZnN is a relatively new material and its physical properties are not yet well studied. In this research, ZnN thin films having different thickness values were deposited on glass substrates by means of radio frequency (RF) reactive magnetron sputtering technique at room temperature and some physical properties of ZnN thin films were investigated by several techniques. UV-vis spectrophotometer and reflectometer were employed to investigate the optical properties of the produced thin films. The surface properties were investigated by using tensiometer and atomic force microscope (AFM). The effects of film thickness on the optical and surface properties of ZnN thin films were discussed. The refractive index and band gap values were found to be dependent on thickness of ZnN thin films. The AFM investigations indicated that the surfaces of the films are compact and smooth. From the wetting experiments, it was found that the surfaces of the films are hydrophobic and surface free energy values are low as reported in literature.
dc.identifier.doi10.1016/j.ijleo.2019.06.015
dc.identifier.endpage21
dc.identifier.issn0030-4026
dc.identifier.scopus2-s2.0-85066798157
dc.identifier.scopusqualityQ2
dc.identifier.startpage15
dc.identifier.urihttps://doi.org/10.1016/j.ijleo.2019.06.015
dc.identifier.urihttps://hdl.handle.net/11501/1164
dc.identifier.volume191
dc.identifier.wosWOS:000494468300003
dc.identifier.wosqualityQ2
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherElsevier Gmbh
dc.relation.ispartofOptik
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.subjectZnn Thin Films
dc.subjectRf Magnetron Sputtering
dc.subjectOptical Properties
dc.subjectSurface Properties
dc.titleOptical and surface properties of ZnN thin films manufactured by radio frequency reactive magnetron sputtering
dc.typeArticle

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