Production of piezoelectric cantilever using MEMS-based layered manufacturing technology

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dc.authoridÖZER, Salih/0000-0002-6968-8734
dc.authoridErtugrul, Ishak/0000-0001-9586-0377
dc.authorwosidÖZER, Salih/AAN-3133-2020
dc.authorwosidÜlkir, Osman/AAI-2940-2020
dc.authorwosidErtugrul, Ishak/AAP-5865-2020
dc.contributor.authorUlkir, Osman
dc.contributor.authorErtugrul, Ishak
dc.contributor.authorAkkus, Nihat
dc.contributor.authorOzer, Salih
dc.date.accessioned2024-06-13T20:18:01Z
dc.date.available2024-06-13T20:18:01Z
dc.date.issued2023
dc.departmentİstanbul Gedik Üniversitesi
dc.description.abstractPiezoelectric cantilever is widely preferred in many fields due to its small size, simple and perfect design, easy control process, easy integration with integrated circuits. The tip displacement is the most important character of piezoelectric cantilever and many models have been used for char-acterization. These models are only suitable for piezoelectric cantilever structures of the same length and layer thickness. In this study, a new model is proposed to estimate the tip displacement of a micro-electro-mechanical system (MEMS) based piezoelectric cantilever with layers of different lengths and thicknesses. Modeling was carried out in COMSOL Multiphysics software in 3D format with reference to the bimorph structure. The fabrication of the piezoelectric cantilever was made by Stereolithography (SLA), which is one of the additive manufacturing methods. Theoretical, simulated and real-time experiments were carried out to measure the tip displace-ment of the piezoelectric cantilever. An electrical characterization experiment was set up to measure tip displacement under constant voltage of the cantilever in real-time experiments. This setup includes an optical microscope and digital camera to observe displacements in the probe station. As a result of the characterization, it was found that the cantilever produced a maximum 14.98 mu m tip displacement of 900 mu m length, 225 mu m width and 40 mu m thickness under 10 V voltage. In addition, it has been determined that the tip displacement of the piezoelectric cantilever is directly proportional to the length and inversely proportional to the layer thickness. The results show that the model is in good agreement with the finite element method (FEM) simulation, theoretical and experimental measurements.
dc.description.sponsorshipMus Alparslan University Technology Research and Project Coordination Unit [BAP-21-TBMY-4901-04]
dc.description.sponsorshipThis research was supported by Mus Alparslan University Technology Research and Project Coordination Unit as a project numbered BAP-21-TBMY-4901-04. This study was carried out in Mus Alparslan University, Vocational School of Technical Sciences, Unmanned Aerial Vehicles Laboratory.
dc.identifier.doi10.1016/j.ijleo.2022.170472
dc.identifier.issn0030-4026
dc.identifier.issn1618-1336
dc.identifier.scopus2-s2.0-85145657634
dc.identifier.scopusqualityQ2
dc.identifier.urihttps://doi.org/10.1016/j.ijleo.2022.170472
dc.identifier.urihttps://hdl.handle.net/11501/1165
dc.identifier.volume273
dc.identifier.wosWOS:000918326500001
dc.identifier.wosqualityN/A
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherElsevier Gmbh
dc.relation.ispartofOptik
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.subjectPiezoelectric Cantilever
dc.subjectMems
dc.subjectTip Displacement
dc.subjectStereolithography
dc.subjectElectrical Characterization
dc.subjectConstituent Equations
dc.subjectFabrication
dc.subjectStereolithography
dc.subjectEnergy
dc.subjectComposite
dc.subjectDesign
dc.subjectCell
dc.titleProduction of piezoelectric cantilever using MEMS-based layered manufacturing technology
dc.typeArticle

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