Study of the effect of argon pressure on the temperature of a hot target

dc.contributor.authorKozin, A. A.
dc.contributor.authorShapovalov, V.I.
dc.contributor.authorAhmedov, Haji
dc.contributor.authorDemir, Arif
dc.contributor.authorKorutlu, Beste
dc.contributor.authorShabalin, A. E.
dc.date.accessioned2024-06-13T20:15:55Z
dc.date.available2024-06-13T20:15:55Z
dc.date.issued2020
dc.departmentFakülteler, Mühendislik Fakültesi, Metalurji ve Malzeme Mühendisliği Bölümü
dc.description17th International Scientific and Technical Conference Rapid Solidification Materials and Coatings, RSMC 2020 -- Moscow -- 20-21 October 2020
dc.description.abstractIn this work, thermal processes in direct current operating magnetron with hot titanium target are studied in Argon medium. Thermal processes are described by stationary, three-dimensional, heat equation with surface heat source which is the flux of argon ions from the gas discharge. The problem was solved numerically via the Heat Transfer Module in COMSOL Multiphysics Software.
dc.identifier.doi10.1088/1742-6596/1713/1/012021
dc.identifier.issn1742-6588
dc.identifier.issue1
dc.identifier.scopus2-s2.0-85098787170
dc.identifier.scopusqualityQ3
dc.identifier.urihttps://doi.org/10.1088/1742-6596/1713/1/012021
dc.identifier.urihttps://hdl.handle.net/11501/956
dc.identifier.volume1713
dc.indekslendigikaynakScopus
dc.institutionauthorDemir, Arif
dc.institutionauthorid0000-0002-3781-4505
dc.language.isoen
dc.publisherIOP Publishing Ltd
dc.relation.ispartofJournal of Physics: Conference Series
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/openAccess
dc.subjectArgon
dc.subjectCoatings
dc.subjectHeat Transfer
dc.subjectMagnetrons
dc.subjectArgon Pressure
dc.titleStudy of the effect of argon pressure on the temperature of a hot target
dc.typeConference Object

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